Working with Virtual Stations in the ILT Base Station

One ILT Base Station can connect to up to six tools. These tools can be connected either to a Power Focus 6000 and/or to a Power Focus 4000 and/or to an ICB or ITB tool with an integrated controller. These connections are enabled via virtual stations that need to be created in the ILT Base Station.

Each of the ILT Base Station virtual stations needs to be connected to: